Oxides deposition
Oxide deposition system for 2- to 18-inch wafers, offering outstanding deposition uniformity
CBVD technology developed in partnership with our partner 3D Oxides
Excellent deposition uniformity on wafers up to Ø450 mm
Real-time monitoring to maintain optimal growth conditions
Fully automated process
Discover the Sybilla machine.
Thin layers oxides deposition
Socrate Industrie, in collaboration with 3D-Oxides.
Wafers up to Ø150 mm
Reflectometry and RHEED mapping
Industrial and R&D applications
Excellent deposition uniformity
